中文

SiC单晶衬底的超精密加工

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  • Project Name:SiC单晶衬底的超精密加工

  • Institution:晶体材料研究院(晶体材料全国重点实验室)

  • Leading Scientist:胡小波

  • Supported by:教育部

  • Nature of Project:纵向

  • Project Level:省、部委级

  • Project Participants:彭燕,胡小波,徐现刚,于光伟

  • Project Number:kyxm-30048

  • Project Approval Number:707039

  • Date of Project Approval:2008-01-01

  • Scheduled Completion Time:2010-12-30

  • Date of Project Completion:2010-12-30

  • Date of Project Initiation:2008-01-01

  • Release Time:2019-04-17

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