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SiC衬底超精密面型加工研究

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  • Project Name:SiC衬底超精密面型加工研究

  • Institution:晶体材料研究院(晶体材料全国重点实验室)

  • Leading Scientist:胡小波

  • Supported by:2012山东省科技发展计划第二批

  • Nature of Project:纵向

  • Project Level:省、部委级

  • Project Participants:胡小波,胡小波

  • Project Number:kyxm-40547

  • Project Approval Number:2012GZC20201

  • Date of Project Approval:2012-01-01

  • Scheduled Completion Time:2013-12-31

  • Date of Project Completion:2013-12-31

  • Date of Project Initiation:2012-01-01

  • Release Time:2019-04-17

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