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6-8英寸4H-SiC衬底产业化关键技术研究

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  • Project Name:6-8英寸4H-SiC衬底产业化关键技术研究

  • Institution:晶体材料研究院(晶体材料全国重点实验室)

  • Leading Scientist:杨祥龙

  • Nature of Project:纵向

  • Project Level:省、部委级

  • Project Participants:姬长来,王建军,宿元花,张防珍,杨祥龙,胡小波,谢雪健,陈秀芳,肖龙飞

  • Project Number:922926098F5071C3E053BE07C2CA50B0

  • Project Approval Number:2019B010126001

  • Date of Project Approval:2019-01-01

  • Scheduled Completion Time:2021-12-31

  • Date of Project Completion:2021-12-31

  • Date of Project Initiation:2019-01-01

  • Release Time:2020-03-21

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