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6-8英寸4H-SiC衬底产业化关键技术研究

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  • Affiliation of Participant(s):晶体材料研究所

  • Leading Scientist:yangxianglong

  • Type of Project:其他科技服务

  • Nature of Project:纵向

  • Project level:省、部委级

  • Project Participants:jichanglai,wangjianjun,suyuanhua,zhangfangzhen,yangxianglong,huxiaobo,xiexuejian,chenxiufang,xiaolongfei

  • Project Number:922926098F5071C3E053BE07C2CA50B0

  • Project Approval Number:2019B010126001

  • Date of Project Approval:2019-01-01

  • Date of Project Initiation:2019-01-01

  • Scheduled completion time:2021-12-31

  • Date of Project Completion:2021-12-31

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