Affiliation of Participant(s):新一代半导体材料集成攻关大平台
Leading Scientist:xuxiangang
Type of Project:研究与发展成果应用
Nature of Project:横向
Project Participants:chenxiufang,pengyan,xumingsheng,xiexuejian,Duo Liu,liuxintong
Project Number:A3733C2A75E9153AE053BE07C2CA99B9
Date of Project Approval:2019-09-01
Date of Project Initiation:2019-09-01
Scheduled completion time:2022-08-30
Date of Project Completion:2022-08-30
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