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锗氮共掺碳化硅晶体杂质浓度表征及其电学性质研究

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  • Affiliation of Author(s):晶体材料研究所

  • Journal:无机材料学报

  • Key Words:物理气相传输法;;Ge掺杂;;晶格匹配;;欧姆接触;;迁移率

  • All the Authors:huxiaobo,chenxiufang,yangxianglong,xiexuejian,xiaolongfei,xuxiangang

  • First Author:李天

  • Indexed by:Unit Twenty Basic Research

  • Document Code:76917

  • Issue:05

  • Translation or Not:no

  • Date of Publication:2018-04-24

  • Date of Publication:2018-04-24
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