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Micropipes in SiC Single Crystal Observed by Molten KOH Etching

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:Materials

  • Key Words:KOH etching;Raman;SiC;classification of etch pits;micropipes

  • First Author:王鹤静

  • Document Code:18C6ADB4AA254E6F8230FBDB05D67A1D

  • Issue:19

  • Number of Words:5000

  • Translation or Not:no

  • Date of Publication:2021-10-01

  • Date of Publication:2021-10-01
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