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    Micropipes in SiC Single Crystal Observed by Molten KOH Etching

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    • Institution:新一代半导体材料研究院

    • Title of Paper:Micropipes in SiC Single Crystal Observed by Molten KOH Etching

    • Journal:Materials

    • Key Words:KOH etching;Raman;SiC;classification of etch pits;micropipes

    • First Author:王鹤静

    • Document Code:18C6ADB4AA254E6F8230FBDB05D67A1D

    • Issue:19

    • Number of Words:5000

    • Translation or Not:No

    • Date of Publication:2021-10

    • Release Time:2022-10-29
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