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    用于MPCVD 金刚石薄膜生长的高表面质量HTHP 金刚石的制备

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    • Institution:新一代半导体材料研究院

    • Title of Paper:用于MPCVD 金刚石薄膜生长的高表面质量HTHP 金刚石的制备

    • Journal:《材料导报》

    • Key Words:激光切割;化学机械抛光;HTHP金刚石;MPCVD金刚石薄膜

    • First Author:段鹏

    • Document Code:10D52FA284B54FC2A08D0CE58B3C3282

    • Issue:4

    • Number of Words:3000

    • Translation or Not:No

    • Date of Publication:2021-02

    • Release Time:2022-11-02
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