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一种碳化硅单晶生长方法及碳化硅单晶

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  • Affilication of Author(s):新一代半导体材料研究院

  • Type of Patent:发明

  • Application Number:202211312028.X

  • Number of Inventors:4

  • Service Invention or Not:no

  • Application Date:2022-10-25

  • Publication Date:2025-03-07

  • Authorization Date:2025-03-07

  • Publication Date:2025-03-07

  • Application Date:2022-10-25

  • Authorization Date:2025-03-07
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