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4英寸氧化镓单晶生长与性能

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Institution:新一代半导体材料研究院

Title of Paper:4英寸氧化镓单晶生长与性能

Journal:《人工晶体学报》

First Author:穆文祥

Document Code:1575306206225580033

Volume:51

Issue:Z1

Page Number:1-5

Translation or Not:No

Date of Publication:2022-08

Release Time:2024-10-15

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