Ji Ziwu
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Paper Publications
FBAR电极和压电薄膜制备工艺研究
Release Time:2024-01-09| Hits:
Institution:集成电路学院
Title of Paper:FBAR电极和压电薄膜制备工艺研究
Journal:《半导体技术》
Document Code:273948CBD7C244CBBEC5D18AAEAD844C
Volume:第 ４８ 卷
Issue:第 １２ 期
Number of Words:4800
Translation or Not:No
Date of Publication:2023-12
Release Time:2024-01-09
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