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The influence of the PCF scattering on the electrical properties of the AlGaN/AlN/GaN HEMTs after the Si3N4 surface passivation

Release time:2019-04-14
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Affiliation of Author(s):
微电子学院
Journal:
Applied Physics A-Materials Science & Processing
All the Authors:
linzhaojun,Cheng Aijie
First Author:
付晨
Indexed by:
综合研究
Document Code:
F32AD635A7794EE79E6E6951FD576DD1
Volume:
124
Issue:
4
Translation or Not:
no
Date of Publication:
2018-04-01