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所属单位：Shandong University, Weihai

发表刊物：The International Journal of Advanced Manufacturing Technology

关键字：Ultrasonic vibration · Electrochemical · Discharge plasma · Electrothermal conversion · Machining quality

摘要：Microstructures in glass materials have important applications in fields such as aerospace, MEMS, and medicine. Current
non-traditional machining methods used for micro-slit fabrication suffer from poor sustainability, large slit widths, and poor
surface quality. To analyze the transformation relationship between the electrical energy and the heat energy from the dis
charge plasma point of view, a new method of electrochemical-assisted discharge plasma machining of glass microstructures
by ultrasonic vibrating wire electrode is proposed. Firstly, the electrothermal energy conversion is studied through simulation
and modeling, and the mechanism of improving machining quality by ultrasonic is illustrated. Then, the influence of the key
machining parameters on the quality of the slit is studied. The experimental results show that when ultrasonic vibration is
applied to the wire electrode, the optimum amplitude is 7.5 μm. The average slit width is reduced by 20.99% and the sur
face roughness is reduced by 54.23%. Finally, the micro-star structure with a slit width of 64.94 μm and surface roughness
of 0.35 μm was successfully machined by selecting the optimum parameters. It is shown that the electrochemical-assisted
discharge plasma machining of glass microstructures by ultrasonic vibrating wire electrode can effectively improve the
machining quality and stability, providing the feasibility for further machining of more complex microstructures of non
conductive hard brittle materials

全部作者：Chengzhi Wang, Kan Wang

第一作者：Haichao Xu

论文类型：Research Paper

通讯作者：Yong Liu

论文编号：10.1007/s00170-025-15162-1

文献类型：Journal article

卷号：136

页面范围：5241-5256

ISSN号：0268-3768

是否译文：否

发表时间：4533-02-01