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个人信息Personal Information
教授 博士生导师 硕士生导师
性别:男
毕业院校:南京航空航天大学
学历:博士研究生毕业
学位:工学博士学位
在职信息:在职
所在单位:机电与信息工程学院
入职时间:2011-03-09
办公地点:知行北楼305室
联系方式:rzliuyong@163.com
电子邮箱:rzliuyong@163.com
A green and precision compound machining method for glass micro components – Ultrasonic assisted electrochemical discharge grinding with multi-hole tube electrode
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所属单位:Shandong University, Weihai
发表刊物:CIRP Journal of Manufacturing Science and Technology
关键字:Green machiningUltrasonic assistedElectrochemical discharge grindingGas filmResponse surface methodologySurface roughness
摘要:Glass is a widely used material in key fields such as Micro-Electro-Mechanical Systems (MEMS) due to its excellent properties. The existing non-traditional glass machining methods have problems such as high pollution, difficult operation, and poor sustainability, this article utilizes the effective combination of electrochemical discharge machining and grinding (named electrochemical discharge grinding, ECDG), by using NaHCO3 solution as electrolyte to achieve green machining. Utilizing ultrasonic vibration and multi-hole tube electrode to achieve precise and stable machining. Modeling and simulation analysis were conducted on the material removal rate and grinding force during the machining process, which profoundly revealed the joint improvement mechanism of spark discharge and ultrasonic vibration on grinding quality. First, a single factor experiment was used to preliminarily determine the machining threshold. Second, the Plackett-Burman experiment was used to screen key machining parameters. Then, Box-Behnken experiment was conducted on key machining parameters, and multi-objective and multi-factor optimization was performed to obtain the optimal combination of machining parameters. Compared with normal ECDG with cylindrical grinding electrode, the overcut is reduced by 8.3 %, the edge damage is reduced by 17.5 % and the surface roughness value is reduced by 70.6 %. Finally, by using the optimized combination of machining parameters, high-quality and stable machining of typical microchannel structures was achieved. The milling depth of the microchannel is 400 µm. The machining width is 1175 ± 5 µm. The surface roughness of the measurement area is 0.375 µm. The green, high-quality and stable machining of micro glass micro components further demonstrates the potential application of this compound technology.
全部作者:Tianbo Wang, Haichao Xu, Kan Wang
第一作者:Chengzhi Wang
论文类型:Research Paper
通讯作者:Yong Liu
论文编号:10.1016/j.cirpj.2024.05.010
文献类型:Journal article
卷号:52
页面范围:129-148
ISSN号:1755-5817
是否译文:否
发表时间:4553-06-01
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