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Study of poly(vinylidene fluoride-trifluoroethylene) as a potential organic high K gate dielectric

Release Time:2019-10-24
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Institution:
微电子学院
Title of Paper:
Study of poly(vinylidene fluoride-trifluoroethylene) as a potential organic high K gate dielectric
Journal:
J. Vac. Sci. Technol., A
First Author:
Li Yuxiang
All the Authors:
Li Yuxiang
Document Code:
lw-85104
Volume:
25
Issue:
2
Page Number:
275
Translation or Not:
No
Date of Publication:
2007-03
Release Time:
2019-10-24