Etching SiO2 with HF/pyridine-supercritical carbon dioxide solutions and resultant interfacial electronic properties
Release Time:2019-10-24
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- Institution:
- 微电子学院
- Title of Paper:
- Etching SiO2 with HF/pyridine-supercritical carbon dioxide solutions and resultant interfacial electronic properties
- Journal:
- J. Vac. Sci. Technol., B
- First Author:
- Li Yuxiang
- All the Authors:
- Li Yuxiang
- Document Code:
- lw-102450
- Volume:
- 25
- Issue:
- 4
- Page Number:
- 1139
- Translation or Not:
- No
- Date of Publication:
- 2007-06
- Release Time:
- 2019-10-24