Electron transport mechanism through ultrathin Al2O3 films grown at low temperatures using atomic–layer deposition
Release Time:2019-10-25
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- Institution:
- 微电子学院
- Title of Paper:
- Electron transport mechanism through ultrathin Al2O3 films grown at low temperatures using atomic–layer deposition
- Journal:
- Semiconductor Science and Technology, 34, 105004 (2019)
- First Author:
- Pengfei Ma,马鹏飞
- Correspondence Author:
- Yuxiang Li,Aimin Song
- All the Authors:
- Song A M,Li Yuxiang,辛倩,Wenhao Guo,Jiamin Sun,Jiacheng Gao,Guanqun Zhang,Qian Xin
- Indexed by:
- Applied Research
- Document Code:
- 88E26D2A696048E9B15A76399673DAD1
- Volume:
- 34
- Issue:
- 10
- Page Number:
- 105004
- Translation or Not:
- No
- Date of Publication:
- 2019-07
- Release Time:
- 2019-10-25