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Affiliation of Author(s):微电子学院

Journal:Semiconductor Science and Technology, 34, 105004 (2019)

All the Authors:xinqian,Li Yuxiang,Song A M,Wenhao Guo,Jiamin Sun,Jiacheng Gao,Guanqun Zhang,Qian Xin

First Author:马鹏飞,Pengfei Ma

Indexed by:Applied Research

Correspondence Author:Yuxiang Li,Aimin Song

Document Code:88E26D2A696048E9B15A76399673DAD1

Volume:34

Issue:10

Page Number:105004

Translation or Not:no

Date of Publication:2019-07-11