Electron transport mechanism through ultrathin Al2O3 films grown at low temperatures using atomic–layer deposition
Release time:2019-10-25
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- Affiliation of Author(s):
- 微电子学院
- Journal:
- Semiconductor Science and Technology, 34, 105004 (2019)
- All the Authors:
- xinqian,Li Yuxiang,Song A M,Wenhao Guo,Jiamin Sun,Jiacheng Gao,Guanqun Zhang,Qian Xin
- First Author:
- 马鹏飞,Pengfei Ma
- Indexed by:
- Applied Research
- Correspondence Author:
- Yuxiang Li,Aimin Song
- Document Code:
- 88E26D2A696048E9B15A76399673DAD1
- Volume:
- 34
- Issue:
- 10
- Page Number:
- 105004
- Translation or Not:
- no
- Date of Publication:
- 2019-07-11