High-dose ion-implanted photoresist stripping in environmentally benign supercritical CO2 nonfluorous surfactant microemulsions
Release time:2019-10-30
Hits:
- Affiliation of Author(s):
- 微电子学院
- Journal:
- Microelectron. Eng.
- All the Authors:
- wangqingpu,Li Yuxiang
- First Author:
- 韩婷婷
- Indexed by:
- Applied Research
- Document Code:
- lw-136618
- Volume:
- 96
- Page Number:
- 1
- Translation or Not:
- no
- Date of Publication:
- 2012-03-20