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Solar-blind ultraviolet photodetectors based on Ta-doped β-Ga2O3 heteroepitaxial films

Release time:2022-12-16
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Affiliation of Author(s):
微电子学院
Journal:
OPTICAL MATERIALS
Key Words:
Doping;Epitaxial film;Metal-semiconductor-metal structure;Ultraviolet detector;β-Ga2O3
First Author:
王迪
Document Code:
1541720342197714945
Volume:
129
Number of Words:
5
Translation or Not:
no
Date of Publication:
2022-07-01