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Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD
Affiliation of Author(s):微电子学院
Journal:CERAMICS INTERNATIONAL Journal
First Author:马瑾
Document Code:FC05275B00DC4305A1EC798416E4AF56
Issue:48
Page Number:26800
Number of Words:5
Translation or Not:no
Date of Publication:2022-06-01