Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD
Release time:2022-12-17
Hits:
- Affiliation of Author(s):
- 微电子学院
- Journal:
- CERAMICS INTERNATIONAL Journal
- First Author:
- 马瑾
- Document Code:
- FC05275B00DC4305A1EC798416E4AF56
- Issue:
- 48
- Page Number:
- 26800
- Number of Words:
- 5
- Translation or Not:
- no
- Date of Publication:
- 2022-06-01