一种正钛酸锌单晶薄膜及其制备方法
Release time:2021-10-01
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- Affilication of Author(s):
- 微电子学院
- Type of Patent:
- 发明
- Application Number:
- 202110061885.6
- Number of Inventors:
- 2
- Service Invention or Not:
- no
- Application Date:
- 2021-01-18
- Publication Date:
- 2022-08-09
- Authorization Date:
- 2022-08-09
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