一种正钛酸锌单晶薄膜及其制备方法
Release Time:2021-10-01
Hits:
- Title:
- 一种正钛酸锌单晶薄膜及其制备方法
- Institution:
- 集成电路学院
- Type of Patent:
- Invent
- Application Number:
- 202110061885.6
- Number of Inventors:
- 2
- Service Invention or Not:
- No
- Application Date:
- 2021-01-18
- Publication Date:
- 2022-08-09
- Authorization Date:
- 2022-08-09
- Release Time:
- 2021-10-01
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