Title : Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD

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Affiliation of Author(s):微电子学院

Title of Paper:Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD

Journal:Materials Research Bulletin

First Author:王迪

Document Code:4D4D953CCFCB46E68E85AE80D961AD64

Volume:149

Number of Words:5

Translation or Not:no

Date of Publication:2022-05-01