Title of Award : Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD
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Institution:集成电路学院
Title of Paper:Effect of epitaxial growth rate on morphological, structural and optical properties of beta-Ga2O3 films prepared by MOCVD
Journal:Materials Research Bulletin
First Author:王迪
Document Code:4D4D953CCFCB46E68E85AE80D961AD64
Volume:149
Number of Words:5
Translation or Not:No
Date of Publication:2022-05
Release Time:2022-06-18
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