Paper Publications
Title of Award : Synthesis of δ-Ta2O5 heteroepitaxial films on YVO4 (100) substrates
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Institution:集成电路学院
Title of Paper:Synthesis of δ-Ta2O5 heteroepitaxial films on YVO4 (100) substrates
Journal:Materials Science in Semiconductor Processing
First Author:马瑾
Document Code:CF6755ED98964DA483876174047E5EC1
Issue:135
Page Number:106065
Number of Words:4
Translation or Not:No
Date of Publication:2021-07
Release Time:2022-02-19