Title : Solar-blind ultraviolet photodetectors based on Ta-doped β-Ga2O3 heteroepitaxial films

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Affiliation of Author(s):微电子学院

Title of Paper:Solar-blind ultraviolet photodetectors based on Ta-doped β-Ga2O3 heteroepitaxial films

Journal:OPTICAL MATERIALS

Key Words:Doping;Epitaxial film;Metal-semiconductor-metal structure;Ultraviolet detector;β-Ga2O3

First Author:王迪

Document Code:1541720342197714945

Volume:129

Number of Words:5

Translation or Not:no

Date of Publication:2022-07-01