Title : Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD

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Affiliation of Author(s):微电子学院

Title of Paper:Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD

Journal:CERAMICS INTERNATIONAL Journal

First Author:马瑾

Document Code:FC05275B00DC4305A1EC798416E4AF56

Issue:48

Page Number:26800

Number of Words:5

Translation or Not:no

Date of Publication:2022-06-01