Paper Publications
Title of Award : Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD
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Institution:集成电路学院
Title of Paper:Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD
Journal:Ceramics International
First Author:马瑾
Document Code:FC05275B00DC4305A1EC798416E4AF56
Issue:48
Page Number:26800
Number of Words:5
Translation or Not:No
Date of Publication:2022-06
Release Time:2022-12-17