Title of Award : 一种高质量锡酸锌单晶薄膜及其制备方法
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Title:一种高质量锡酸锌单晶薄膜及其制备方法
Institution:集成电路学院
Type of Patent:Invent
Application Number:201910536407.9
Number of Inventors:2
Service Invention or Not:No
Publication Date:2020-11-27
Authorization Date:2020-11-27
Release Time:2021-10-09
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