Title : 一种高质量锡酸锌单晶薄膜及其制备方法
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Title:一种高质量锡酸锌单晶薄膜及其制备方法
Affilication of Author(s):微电子学院
Type of Patent:发明
Application Number:201910536407.9
Number of Inventors:2
Service Invention or Not:no
Publication Date:2020-11-27
Authorization Date:2020-11-27
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