Patents
Title of Award : 一种正钛酸锌单晶薄膜及其制备方法
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Title:一种正钛酸锌单晶薄膜及其制备方法
Institution:集成电路学院
Type of Patent:Invent
Application Number:202110061885.6
Number of Inventors:2
Service Invention or Not:No
Application Date:2021-01-18
Publication Date:2022-08-09
Authorization Date:2022-08-09
Release Time:2021-10-01