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晶格畸变检测仪研究碳化硅晶片中位错缺陷分布

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  • Affiliation of Author(s):晶体材料研究院

  • Journal:《人工晶体学报》

  • First Author:杨祥龙

  • Document Code:A855FB7960E2436D8F3E94DEBB7A217F

  • Issue:4

  • Translation or Not:no

  • Date of Publication:2021-04-01

  • Date of Publication:2021-04-01
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