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Micropipes in SiC Single Crystal Observed by Molten KOH Etching

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:MATERIALS

  • First Author:王鹤静

  • Document Code:47B22E7CACAC4635915F73FF7E3E6857

  • Volume:14

  • Issue:19

  • Number of Words:5000

  • Translation or Not:no

  • Date of Publication:2021-10-01

  • Date of Publication:2021-10-01
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