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Roughness control in the processing of 2-inch polycrystalline diamond films on 4H-SiC wafers

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:Materials Science in Semiconductor Processing

  • First Author:胡秀飞

  • Document Code:1833780037035331586

  • Volume:184

  • Number of Words:7

  • Translation or Not:no

  • Date of Publication:2024-12-01

  • Date of Publication:2024-12-01
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