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Effect of nitrogen doping concentration on 4H-SiC laser slicing

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  • Affiliation of Author(s):新一代半导体材料研究院

  • Journal:Journal of the American Ceramic Society

  • First Author:陈秋

  • Document Code:F446042385FF456791A778937BB905AA

  • Issue:e20555

  • Number of Words:3

  • Translation or Not:no

  • Date of Publication:2025-04-04

  • Date of Publication:2025-04-04
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