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    Effect of nitrogen doping concentration on 4H-SiC laser slicing

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    • Institution:新一代半导体材料研究院

    • Title of Paper:Effect of nitrogen doping concentration on 4H-SiC laser slicing

    • Journal:Journal of the American Ceramic Society

    • First Author:陈秋

    • Document Code:F446042385FF456791A778937BB905AA

    • Issue:e20555

    • Number of Words:3

    • Translation or Not:No

    • Date of Publication:2025-04

    • Release Time:2025-05-24
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