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一种减少碳化硅单晶中碳包裹体的新型坩埚和单晶生长方法

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  • Affilication of Author(s):晶体材料研究所

  • Patent Applicant:huxiaobo,xuxiangang,yangxianglong,chenxiufang,pengyan

  • Type of Patent:发明

  • Application Number:2017102628610

  • Number of Inventors:5

  • Service Invention or Not:no

  • Application Date:2017-04-20

  • Publication Date:2019-06-18

  • Authorization Date:2019-06-18

  • Publication Date:2019-06-18

  • Application Date:2017-04-20

  • Authorization Date:2019-06-18
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