Title : A miniature piezoelectric actuator with fast movement and nanometer resolution
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Affiliation of Author(s):控制科学与工程学院
Title of Paper:A miniature piezoelectric actuator with fast movement and nanometer resolution
Journal:国际机械科学
Document Code:1787755545181315073
Volume:273
Number of Words:6
Translation or Not:no
Date of Publication:2024-07-01
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