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Small angle laser scatterometer with temperature-pressure -controllable sample cell and Characterization method

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  • Affilication of Author(s):材料科学与工程学院

  • Type of Patent:发明

  • Application Number:US11067505B.2

  • Number of Inventors:3

  • Service Invention or Not:no

  • Application Date:2019-03-18

  • Publication Date:2021-07-20

  • Authorization Date:2021-07-20

  • Publication Date:2021-07-20

  • Application Date:2019-03-18

  • Authorization Date:2021-07-20
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