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    Small angle laser scatterometer with temperature-pressure -controllable sample cell and Characterization method

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    • Title:Small angle laser scatterometer with temperature-pressure -controllable sample cell and Characterization method

    • Institution:材料科学与工程学院

    • Type of Patent:Invent

    • Application Number:US11067505B.2

    • Number of Inventors:3

    • Service Invention or Not:No

    • Application Date:2019-03-18

    • Publication Date:2021-07-20

    • Authorization Date:2021-07-20

    • Release Time:2024-12-24

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