王守志
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Efficient access to non-damaging GaN (0001) by inductively coupled plasma etching and chemical–mechanical polishing
  • Affiliation of Author(s):
    新一代半导体材料研究院
  • Journal:
    Applied Surface Science
  • First Author:
    李秋波
  • Document Code:
    EEA4EE88010C49A4A376ADBC15C1CB6F
  • Issue:
    679
  • Number of Words:
    9
  • Translation or Not:
    no
  • Date of Publication:
    2024-09-10

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