王守志
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Suitable AlN Source Shape for Optimizing Gas Mass Transfer During AlN Crystal Growth
  • Affiliation of Author(s):
    新一代半导体材料研究院
  • Journal:
    CRYSTAL GROWTH & DESIGN
  • First Author:
    曹文豪
  • Document Code:
    33084341CA4E4925B450246B4410A205
  • Issue:
    566
  • Number of Words:
    6000
  • Translation or Not:
    no
  • Date of Publication:
    2024-10-09

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