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GaN metal-oxide-semiconductor high-electron-mobility transistors using thermally evaporated SiO as the gate dielectric

Release Time:2019-06-07
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Institution:
微电子学院
Title of Paper:
GaN metal-oxide-semiconductor high-electron-mobility transistors using thermally evaporated SiO as the gate dielectric
Journal:
Semiconductor Science and Technology
First Author:
朱庚昌
All the Authors:
王一鸣,辛倩,徐明升,陈秀芳,徐现刚,冯先进,Song A M
Document Code:
600382F594C94DF2908CDF75E37699EF
Volume:
33
Issue:
9
Translation or Not:
No
Date of Publication:
2018-09
Release Time:
2019-06-07