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辛倩

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Female
Alma Mater:山东大学
Education Level:With Certificate of Graduation for Doctorate Study
Degree:Doctor
Status:Employed
School/Department:集成电路学院
Date of Employment:2012-09-14
College: School of Integrated Circuits,Shandong University
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Current position: Home >> Scientific Research >> Paper Publications
Low-temperature fabrication of HfAlO alloy dielectric using atomic-layer deposition and its application in a low-power device

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Institution:微电子学院

Title of Paper:Low-temperature fabrication of HfAlO alloy dielectric using atomic-layer deposition and its application in a low-power device

Journal:JOURNAL OF ALLOYS AND COMPOUNDS Journal

First Author:马鹏飞

All the Authors:辛倩,Li Yuxiang,Song A M

Document Code:493ECA4D2F7E4A1A8A8F23A9ED815A53

Volume:792

Page Number:543

Translation or Not:No

Date of Publication:2019-07

Release Time:2019-06-06

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