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中文
辛倩

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Female
Alma Mater:山东大学
Education Level:With Certificate of Graduation for Doctorate Study
Degree:Doctor
Status:Employed
School/Department:微电子学院
Date of Employment:2012-09-14
Contact Information:xinq@sdu.edu.cn
E-Mail:xinq@sdu.edu.cn
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Current position: Home >> Scientific Research >> Paper Publications

Low-temperature fabrication of HfAlO alloy dielectric using atomic-layer deposition and its application in a low-power device

Hits: Praise

Affiliation of Author(s):微电子学院

Journal:JOURNAL OF ALLOYS AND COMPOUNDS Journal

All the Authors:xinqian,Li Yuxiang,Song A M

First Author:马鹏飞

Indexed by:Unit Twenty Basic Research

Document Code:493ECA4D2F7E4A1A8A8F23A9ED815A53

Volume:792

Page Number:543

Translation or Not:no

Date of Publication:2019-07-05

 

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