Qr code
中文
辛倩

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Female
Alma Mater:山东大学
Education Level:With Certificate of Graduation for Doctorate Study
Degree:Doctor
Status:Employed
School/Department:集成电路学院
Date of Employment:2012-09-14
College: School of Integrated Circuits,Shandong University
E-Mail:
MOBILE Version
Click:Times

The Last Update Time: ..

QfTF2xbfx4y517R28sEeEY7lAOholDyzYVJrEWwuoLYe8c2X1NO1Ib235fuA
Current position: Home >> Scientific Research >> Paper Publications
A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching

Hits:

Institution:微电子学院

Title of Paper:A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching

Journal:IEEE Transactions on Nanotechnology

First Author:王汉斌

All the Authors:王卿璞,辛倩,韩琳,Song A M,王一鸣

Document Code:E56E2B7ED1104702BAEB516FA27F194D

Volume: 16

Issue:2

Page Number:290

Translation or Not:No

Date of Publication:2017-03

Release Time:2019-06-12

Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University