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中文
辛倩

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Female
Alma Mater:山东大学
Education Level:With Certificate of Graduation for Doctorate Study
Degree:Doctor
Status:Employed
School/Department:微电子学院
Date of Employment:2012-09-14
Contact Information:xinq@sdu.edu.cn
E-Mail:xinq@sdu.edu.cn
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Current position: Home >> Scientific Research >> Paper Publications

A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching

Hits: Praise

Affiliation of Author(s):微电子学院

Journal:IEEE Transactions on Nanotechnology

All the Authors:Yiming Wang,wangqingpu,xinqian,hanlin,Song A M

First Author:王汉斌

Indexed by:Unit Twenty Basic Research

Document Code:E56E2B7ED1104702BAEB516FA27F194D

Volume: 16

Issue:2

Page Number:290

Translation or Not:no

Date of Publication:2017-03-01

 

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