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辛倩

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Female
Alma Mater:山东大学
Education Level:With Certificate of Graduation for Doctorate Study
Degree:Doctor
Status:Employed
School/Department:集成电路学院
Date of Employment:2012-09-14
College: School of Integrated Circuits,Shandong University
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Current position: Home >> Scientific Research >> Paper Publications
A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching

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Institution:集成电路学院

Title of Paper:A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching

Journal:IEEE Transactions on Nanotechnology

First Author:王汉斌

All the Authors:辛倩,韩琳,Song A M,王一鸣,王卿璞

Document Code:E56E2B7ED1104702BAEB516FA27F194D

Volume:16

Issue:2

Page Number:290

Translation or Not:No

Date of Publication:2017-03

Release Time:2019-10-24

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