Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface.
发布时间：2026-04-01
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- 论文名称：
- Reduced fatigue and leakage of ferroelectric TiN/Hf0.5Zr0.5O2/TiN capacitors by thin alumina interlayers at the top or bottom interface.
- 发表刊物：
- Nanotechnology
- DOI码：
- 10.1088/1361-6528/acad0a
- 是否译文：
- 否
- 发表时间：
- 2023-01
- 发布时间：
- 2026-04-01