The Role of Interface Dynamics on the Reliability Performance of BEOL Integrated Ferroelectric HfO2 Capacitors.
发布时间：2026-04-01
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- 论文名称：
- The Role of Interface Dynamics on the Reliability Performance of BEOL Integrated Ferroelectric HfO2 Capacitors.
- 发表刊物：
- 2022 International Electron Devices Meeting (IEDM)
- DOI码：
- 10.1109/IEDM45625.2022.10019554
- 是否译文：
- 否
- 发表时间：
- 2023-01
- 发布时间：
- 2026-04-01