Affiliation of Participant(s):新一代半导体材料研究院
Leading Scientist:韩吉胜
Supported by:2022年山东省重点研发计划（重大科技创新工程）
Nature of Project:纵向
Project level:省、部委级
Project Number:E03790E5561435E9E053BE07C2CAD17B
Project Approval Number:2022CXGC010103-1
Date of Project Approval:2022-02-01
Date of Project Initiation:2022-02-01
Scheduled completion time:2025-02-28
Date of Project Completion:2025-02-28