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Affiliation of Participant(s):新一代半导体材料研究院
Leading Scientist:徐现刚
Nature of Project:纵向
Project level:省、部委级
Project Number:F365BC17C58D28FBE053BE07C2CAC7F1
Project Approval Number:2022ZLGX02
Date of Project Approval:2022-11-01
Date of Project Initiation:2022-11-01
Scheduled completion time:2025-12-31
Date of Project Completion:2025-12-31