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Affiliation of Participant(s):新一代半导体材料集成攻关大平台
Leading Scientist:xuxiangang
Supported by:工研院协同创新中心
Type of Project:研究与发展成果应用
Nature of Project:纵向
Project level:地(市、州)级
Project Participants:huxiaobo,chenxiufang,pengyan,xiexuejian,Duo Liu,liuxintong
Project Number:A9D03988BFBA6387E053BE07C2CAAC38
Project Approval Number:OX2X2019012
Date of Project Approval:2019-09-01
Date of Project Initiation:2019-09-01
Scheduled completion time:2022-08-30
Date of Project Completion:2022-08-30