Affiliation of Author(s):新一代半导体材料研究院
Journal:Materials Science in Semiconductor Processing
First Author:胡秀飞
Document Code:1833780037035331586
Volume:184
Number of Words:7
Translation or Not:no
Date of Publication:2024-12-01
Date of Publication:2024-12-01
徐明升
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Gender:Male
Education Level:Postgraduate (Postdoctoral)
Alma Mater:Shandong University
Paper Publications
Roughness control in the processing of 2-inch polycrystalline diamond films on 4H-SiC wafers
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