山东大学教师主页杨春凤 Prediction of critical undeformed chip thickness for ductile mode to brittle transition in the cutting of single-crystal silicon Home

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Prediction of critical undeformed chip thickness for ductile mode to brittle transition in the cutting of single-crystal silicon

Release Time:2021-10-08 Hits:

Institution:机械工程学院
Journal:Semiconductor Science and Technology
First Author:张磊
Document Code:40BE0964D53E4D0C8476ADB09341EFDB
Volume:35
Issue:9
Number of Words:18
Translation or Not:No
Date of Publication:2020-09

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Prediction of critical undeformed chip thickness for ductile mode to brittle transition in the cutting of single-crystal silicon