山东大学教师主页杨春凤 An analytical model for estimation of the stress field and cracks caused by scratching anisotropic single crystal gallium nitride Home

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An analytical model for estimation of the stress field and cracks caused by scratching anisotropic single crystal gallium nitride

Release Time:2021-10-08 Hits:

Institution:机械工程学院
Journal:Materials Science in Semiconductor Processing
First Author:张磊
Document Code:041836E5C9334A42A2C8BA2572595627
Issue:122
Number of Words:13
Translation or Not:No
Date of Publication:2021-02

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An analytical model for estimation of the stress field and cracks caused by scratching anisotropic single crystal gallium nitride