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Research on material removal mechanism and radial cracks during scribing single crystal gallium nitride

Date of Publication:2021-06-01 Hits:

Affiliation of Author(s):机械工程学院
Journal:Ceramics International
First Author:张磊
Document Code:C86145E2913D4D6CACCDC0A6A73D9039
Volume:47
Issue:11
Page Number:15155
Number of Words:11
Translation or Not:no
Date of Publication:2021-06-01

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