山东大学教师主页杨春凤 Research on material removal mechanism and radial cracks during scribing single crystal gallium nitride Home

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Research on material removal mechanism and radial cracks during scribing single crystal gallium nitride

Release Time:2021-10-08 Hits:

Institution:机械工程学院
Journal:Ceramics International
First Author:张磊
Document Code:C86145E2913D4D6CACCDC0A6A73D9039
Volume:47
Issue:11
Page Number:15155
Number of Words:11
Translation or Not:No
Date of Publication:2021-06

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Research on material removal mechanism and radial cracks during scribing single crystal gallium nitride