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Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC

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Institution:机械工程学院

Title of Paper:Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC

Journal:Tribology International 47 (2012) 100–104

First Author:屈硕硕

Document Code:E22AB4DD89C64A12B09667907F230444

Issue:109515

Number of Words:5000

Translation or Not:No

Date of Publication:2024-03

Release Time:2024-09-24

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