Array structure of monocrystalline silicon surface processed by femtosecond laser machining assisted with anisotropic chemical etching
Hits:
Institution:机械工程学院
Title of Paper:Array structure of monocrystalline silicon surface processed by femtosecond laser machining assisted with anisotropic chemical etching
Journal:Optics and Laser Technology
First Author:王庆伟
Document Code:1737380911723769857
Volume:169
Number of Words:5000
Translation or Not:No
Date of Publication:2024-02
Release Time:2024-10-10