location： Current position: Home >> Scientific Research >> Paper Publications

Array structure of monocrystalline silicon surface processed by femtosecond laser machining assisted with anisotropic chemical etching

Hits:

Affiliation of Author(s):机械工程学院

Journal:Optics &Laser Technology

First Author:王庆伟

Document Code:1737380911723769857

Volume:169

Number of Words:5000

Translation or Not:no

Date of Publication:2024-02-01

Pre One:A porous micro/nano-structured polyethylene film prepared using a picosecond laser for agricultural passive cooling

Next One:Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC

Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep